Materials Processing by Cluster Ion Beams
History, Technology, and ApplicationsMaterials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, f ISBN: 9781498711753, 1498711758
